Method for evaluating semiconductor device

ABSTRACT

The present invention provides a method for evaluating an intended element or a parameter. In addition, the invention provides an evaluation method for obtaining a more precise result rapidly. According to the invention, a plurality of evaluation circuits are formed over the same substrate, and while simultaneously operating the plurality of evaluation circuits, an output of one evaluation circuit selected by a selection circuit that is formed over the substrate is arbitrarily evaluated.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a method for evaluating a semiconductordevice, in particular, relates to a method for evaluating asemiconductor device using a TEG (test element group, also refer to astest structure).

2. Description of the Related Art

Large scale integrated circuits typified by CPUs have been installed notonly in computers but also in various kinds of electric appliances. Inrecent years, the large scale integrated circuits have been installed incards and the like as well as the electronic appliances. Productsincluding the large scale integrated circuits have been spread rapidlybecause of their convenience. Thus, it is thought that applications ofthe large scale integrated circuits will be continued to be expand.

Meanwhile, an integrated circuit can be obtained by arranging andconnecting an enormous number of semiconductor elements such that acertain function can be obtained. However, when failures are caused,e.g., the integrated circuit does not work, since the integrated circuitincludes too many semiconductor elements, it is very difficult toidentify a cause of failures.

Therefore, in order to analyze the cause of failures of the integratedcircuit, a TEG (test element group) is fabricated in each element toevaluate the respective elements (e.g., refer to patent document 1).[Patent Document 1]: Japanese Patent Application Laid-Open No. Hei5-297077

However, it is difficult to statistically determine parameters by usingone TEG Also, there are many parameters that adversely affect anintegrated circuit. Therefore, in order to find out parameters that canoperate an integrated circuit stably in designing the integratedcircuit, enormous numbers of TEGs must be manufactured by way of trialand evaluated, thereby involving a lot of time and effort to produce.

Moreover, it is very difficult to separate an influence of variationcaused by the difference of lots for manufacturing TEGs from aninfluence due to change of intended parameters.

SUMMARY OF THE INVENTION

It is an object of the present invention to provide a method forevaluating an intended element or parameter easily. In particular, it isan object of the invention to provide an evaluation method capable ofobtaining a more precise result rapidly.

In an aspect of the present invention, there is provided an evaluationmethod, wherein a plurality of evaluation circuits are formed over thesame substrate, the plurality of evaluation circuits are simultaneouslyoperated, and an output of one evaluation circuit selected by aselection circuit that is formed over the substrate is evaluatedarbitrarily.

In another aspect of the invention, there is provided an evaluationmethod, wherein a plurality of evaluation circuits are formed over thesame substrate, the plurality of evaluation circuits are divided intogiven plural groups to be operated for each group, and an output of oneevaluation circuit selected by a selection circuit that is formed overthe substrate is evaluated arbitrarily.

In another aspect of the invention, there is provided an evaluationmethod, wherein at least one kind of signal is commonly inputsimultaneously in a plurality of evaluation circuits formed over thesame substrate, and while operating the plurality of evaluationcircuits, one evaluation circuit is selected so that an output of theevaluation circuit is measured. Alternatively, there is provided anevaluation method, wherein while operating the plurality of evaluationcircuits, one evaluation circuit is selected, an output of theevaluation circuit is measured, and the data of the evaluation circuitis stored in a recording medium so as to be evaluated chronologically.

In another aspect of the invention, there is provided an evaluationmethod, wherein at least one kind of signal is commonly inputsimultaneously in a plurality of evaluation circuits having the samecircuit configuration that are formed over the same substrate, and whileactivating the plurality of evaluation circuits, one evaluation circuitis selected so that an output of the evaluation circuit is measured.Alternatively, there is provided an evaluation method, wherein whileoperating the plurality of evaluation circuits, one evaluation circuitis selected, an output of the evaluation circuit is measured, and thedata of the evaluation circuit is stored in a recording medium so as tobe evaluated chronologically.

In another aspect of the invention, there is provided an evaluationmethod, wherein at least one kind of signal is commonly inputsimultaneously in a plurality of evaluation circuits including differentcircuit configurations that are formed over the same substrate, andwhile operating the plurality of evaluation circuits, one evaluationcircuits is selected so that an output of the evaluation circuit ismeasured. Alternatively, there is provided an evaluation method, whereinwhile operating the plurality of evaluation circuits, one evaluationcircuit is selected, an output of the evaluation circuit is measured,and the data of the evaluation circuit is stored in a recording mediumso as to be evaluated chronologically.

In another aspect of the invention, there is provided an evaluationmethod, wherein at least one kind of signal is commonly inputsimultaneously in a plurality of evaluation circuits formed over asubstrate in which parameters of the plurality of evaluation circuitsare changed stepwise, and while operating the plurality of evaluationcircuits, one evaluation circuit is selected and an output of theevaluation circuit is measured. Alternatively, there is provided anevaluation method, wherein while operating the plurality of evaluationcircuits, one evaluation circuit is selected, an output of theevaluation circuit is measured, and the data of the evaluation circuitis stored in a recording medium so as to be evaluated chronologically.

In another aspect of the invention, there is provided a semiconductordevice which has a substrate, a first evaluation circuit over thesubstrate, a second evaluation circuit over the substrate, a selectioncircuit connected to the first evaluation circuit and the secondevaluation circuit, and a determination circuit connected to theselection circuit, wherein the first evaluation circuit and the secondevaluation circuit are connected in parallel.

By providing a plurality of circuits and a selection circuit over thesame substrate, measurement can be carried out efficiently. In addition,by providing the plurality of circuits and the selection circuit overthe same substrate, evaluation can be performed precisely.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A to 1C are conceptual diagrams of circuits provided oversubstrates for evaluation used in the evaluation method according to thepresent invention;

FIG. 2 is a diagram of a circuit provided over a substrate forevaluation that are used in the evaluation method according to theinvention;

FIG. 3 is a diagram of a circuit provided over a substrate forevaluation that is used in the evaluation method according to theinvention;

FIG. 4 is a circuit diagram of a shift register that can be used in theinvention;

FIGS. 5A and 5B are diagrams of circuits provided over substrates forevaluation that are used in the evaluation method according to theinvention;

FIG. 6 shows an example of a determination circuit provided over asubstrate for evaluation that is used in the evaluation method of theinvention;

FIG. 7 shows an example of a flow chart corresponding to the evaluationmethod according to the invention; and

FIG. 8 shows an example of a flow chart corresponding to the evaluationmethod according to the invention.

DETAILED DESCRIPTION OF THE INVENTION

The embodiment modes according to the present invention will hereinafterbe described referring to the accompanying drawings. Further, thepresent invention can be carried out in many different modes. It iseasily understood by those who skilled in the art that embodiment modesand details herein disclosed can be modified in various ways withoutdeparting from the purpose and the scope of the invention. The presentinvention should not be interpreted as being limited to the descriptionof the embodiment modes to be given below.

[Embodiment Mode 1]

FIG. 1A shows a substrate for evaluation comprising a plurality ofevaluation circuits, a selection circuit 10 and a determination circuit11. Data output from n pieces of evaluation circuits is input in thesame selection circuit 10. Data output from the selection circuit 10 isinput in the determination circuit 11. The evaluation circuits 1 to nmay comprise either the same circuit configuration or differentconfigurations from one another. When the evaluation circuits comprisethe same circuit configuration, circuit parameters such as resistance,capacitance and inductance may be differed in the respective circuits.When using evaluation circuits having the same circuit configuration,operations of the plurality of evaluation circuits can simultaneously beevaluated. On the other hand, when using evaluation circuits havingdifferent circuit parameters, a plurality of test parameters cansimultaneously be evaluated.

The substrate for evaluation as shown in FIG. 1A has a configurationwith one input and one output. By using this configuration forevaluation, the evaluation circuits 1 to n are simultaneously operated,a predetermined evaluation circuit is selected from the evaluationcircuits by the selection circuit 10 so that data of the selectedevaluation circuit can be output in the determination circuit 11. Thedata output from the selected evaluation circuit is subjected to anarithmetic processing in the determination circuit 11. A result of thearithmetic processing can be used as data that is necessary to determinean operational state of the selected evaluation circuit. By outputtingdata of the determination circuit 11 to a computer, the data can bedisplayed on a screen to be checked by sight. Also, the data can beoutput into a printer to be printed out. In addition, by storing thedata output from the determination circuit 11 in a recording medium, anoperating characteristic of the evaluation circuit can be evaluatedchronologically. For example, an operational lifetime of the evaluationcircuit can be estimated according to the change in time of the outputdata.

The plurality of evaluation circuits are selected by the selectioncircuit, and only data of the selected evaluation circuit is output. Anyselection method may be employed to select one evaluation circuit fromthe plurality of evaluation circuits. That is, the evaluation circuitsmay be selected sequentially or arbitrarily. Alternatively, theevaluation circuits may be selected by changing the weight for eachcircuit. Also, the evaluation circuits may be selected by arbitrarilyswitching the selection circuits by an operator. In order to determinethe change in operating characteristics of the evaluation circuits withtime, it is preferable that the evaluation circuits 1 to n be selectedin the same manner. Additionally, address information may be added tothe information output from the evaluation circuits so as to identifydata of the respective evaluation circuits 1 to n in every case.

In the substrate for evaluation as shown in FIG. 1A, since only a pieceof data is output to an external unit by selecting one evaluationcircuit by the selection circuit 10, the number of connection portionsof terminals for outputting the data to the external unit can bedrastically reduced as compared with the case of providing no selectioncircuit, thereby reducing a connection failure and saving an effort inconnecting terminals.

Of course, when the design of the configurations of the selectioncircuit and the determination circuit are arbitrarily changed in thesubstrate for evaluation of FIG. 1A, a substrate for evaluation with oneinput and plural outputs can be formed. Similarly, a substrate forevaluation with plural inputs and one output or plural inputs and pluraloutputs can be formed. In any case, analytical data can be obtainedefficiently while simultaneously activating the plurality of evaluationcircuits.

FIG. 1B shows a case in which as substitute for the selection circuit 10and the determination circuit 11, a selection/determination circuit 12that operates similarly to the case of using the selection circuit andthe determination circuit is used. The configuration other than theselection/determination circuit 12 is the same as that of FIG. 1A. Theevaluation circuits as shown in FIG. 1B can be operated similarly tothose of FIG. 1A and has the same properties as those of FIG. 1A.

FIG. 1C shows a configuration in which data of a circuit selected by aselection circuit 13 is directly output to an external unit withoutproviding the determination circuit. An output port can be connected toa computer or a printer, a display device, a recording medium and thelike via a computer. The configuration other than the selection circuit13 is similar to that of FIG. 1A. The evaluation circuits as shown inFIG. 1C can be operated similarly to those of FIG. 1A and has the sameproperties as those of FIG. 1A.

In FIGS. 1A to 1C, various kinds of evaluation circuits can be employedaccording to a purpose of evaluation. Basic circuit elements of a logiccircuit such as an AND circuit, an NOR circuit and an NAND circuit canbe evaluated. Further, various types of circuits such as a register, anoscillator and a counter can also be evaluated. A combination of pluralfunctional circuits such as a circuit in which an inverter chain isconnected between clock synchronizing registers may be used as anevaluation circuit. In addition, a dynamic memory cell, a static memorycell, a flash memory and the like can be evaluated.

Further, various types of evaluation circuits can be formed over asubstrate for evaluation by using a TFT manufactured over a glass orquartz substrate, a TFT that is formed over a glass substrate in advanceand then transferred over a plastic substrate, a MOS transistormanufactured over a crystalline silicon substrate or the like, a MOStransistor formed over an SOI substrate, and the like.

The evaluation method using the substrate for evaluation according tothe present embodiment mode can be utilized in manufacturing variouskinds of devices using semiconductor integrated circuits such as a CPU,a memory, an ID tag used for an RFID (radio frequency identification), aliquid crystal display panel and an EL display panel. More specifically,operating characteristics and operational life times of various kinds ofdevices can be efficiently evaluated by using substrates for evaluationthat are manufactured in the same steps of manufacturing the respectivedevices. Note that various types of evaluation circuits may be formedover a substrate to be mounted on the various kinds of devices insteadof the substrate for evaluation. In this case, the evaluation circuitsmay be separated from the substrate before completion of the device ormay be left in the device.

The plurality of evaluation circuits are formed over each of thesubstrates for evaluation of the present embodiment mode as shown inFIGS. 1A to 1C. The selection circuits for selecting data output fromthe plurality of evaluation circuits and performing one output are alsoprovided over the respective substrates for evaluation. Therefore, eachsubstrate for evaluation requires less number of terminals for supplyingpower to the substrate for evaluation and inputting/outputting a signal.Since the small number of terminals for connecting to an external deviceis required, the probability of causing operation failures due to thecontact failures can be reduced. In addition, a plurality of evaluationcircuits can be formed over the same substrate such that evaluationitems are segmented.

As set forth above, the plurality of circuits can simultaneously beoperated according to this embodiment mode such that many circuits maybe measured or evaluated at extremely shorter times as compared with thecase of measuring multiple independent circuit TEGs respectively.Accordingly, variation of the circuits and statistical data may beextracted precisely. Since only information for one circuit is output ata time, respective circuits can be identified according to a periodduring output of a data and analysis may be performed easily. Inaddition, these circuits are formed over the same substrate, and hence,an adverse influence of the variation caused in respective steps ofmanufacturing the circuits may be prevented. Moreover, the properties ofelements to be compared may be obtained more precisely.

With respect to the plurality of evaluation circuits formed over thesubstrate for evaluation, all of them may be identical to one another.Alternatively, they may be similar to one another, except that onlyintended parameters are changed stepwise. The evaluation circuits canarbitrarily be selected depending on an intended test carried out by anoperator. By changing intended parameters stepwise with respect to theplurality of evaluation circuits, an operating margin, an optimumsolution and the like of an actual circuit can be analyzed easily.

Meanwhile, when a plurality of evaluation circuits are formed to havedifferent configurations from one another, it is possible to selectwhich a circuit will be suitable for a certain purpose. In this case,since tests may be carried out under the same conditions, results thatreflect the properties of the circuit can be obtained.

Further, the present embodiment mode can be implemented by beingcombined with an applicable concept of another embodiment modes of theinvention.

[Embodiment Mode 2]

An influence of different output load (i.e., stress to be applied isdiffered due to difference of a delay situation of a waveform) will beexamined in the present embodiment mode by forming a substrate forevaluation of the invention and by using n pieces of similar ringoscillators in which capacitance of the respective ring oscillators ischanged stepwise. An analog output is employed. This embodiment modewill be described with reference to FIG. 2.

One purpose of this embodiment mode is that deteriorated properties ofthe various ring oscillators are evaluated. The deteriorated propertiesof the ring oscillators with different output load or the differentnumber of stages (number of inverters) of each logic gate are evaluatedrespectively and compared with a deteriorated property of a morecomplicated logic circuit, and hence, the deteriorated property of themore complicated logic circuit can be evaluated easily.

A substrate for evaluation according to the embodiment mode comprises npieces of ring oscillators in which the capacitance is varied stepwise;switches 100 for turning outputs of respective ring oscillators on/off;and a shift register. By stopping a supply of a clock to the shiftregister, the switches are controlled to be turned on/off so as toselect one ring oscillator, thereby obtaining an output of the ringoscillator. The shift register sequentially select the n pieces of ringoscillators to obtain outputs corresponding to respective ringoscillators. In this embodiment mode, the shift register and theswitches 100 correspond to the selection circuit of Embodiment Mode 1and the determination circuit of Embodiment Mode 1 is not mounted on thesame substrate. Further, the determination circuit may be providedeither over the substrate or outside of the substrate. Alternatively,the determination circuit may not be provided both over and outside ofthe substrate.

Since the configuration of FIG. 2 employs the analog output, an analogsignal is directly output to an oscilloscope and a plotter so that awaveform can be observed. According to the waveform, a lot ofinformation about an oscillation frequency, an amplitude, a rise time, afall time and the like can be obtained. When evaluating the degree ofdeterioration, the all ring oscillators are measured by a unit of ΔTthat is sufficiently shorter with respect to a deterioration rate.Measurement of two or more units may be carried out to find acoefficient of fluctuation of these numerical values. The output datamay be processed properly. For example, the output data may be digitizedor a necessary part of the output data may be extracted to bedetermined. Alternatively, the output data may be stored in a memorizingmeans so that it is evaluated by reading out it from the memorizingmeans on an as needed basis. The output data may be stored in thememorizing means via a computer.

As a result of this measurement, deteriorated properties of the variousring oscillators can be evaluated. When the output load of each logicgate and the deteriorated properties of the ring oscillators withdifferent number of stages (number of inverters) are respectivelyevaluated and compared with a deteriorated property of the morecomplicated logic circuit, the deteriorated property of the morecomplicated logic circuit can be evaluated easily by using the ringoscillators.

When evaluation is performed by using such a substrate for evaluation ofthe present invention, since the plurality of circuits aresimultaneously operated, the circuits can be measured or evaluated atshorter times as compared with the case of measuring multipleindependent circuit TEGs individually, and therefore, the variation orthe statistical data can be extracted precisely. In addition, byemploying one output, individual circuits can be identified according totiming when a data is output and the analysis can be performed easily.Further, since these circuits are formed over the same substrate, anadverse influence of the variation caused in respective steps ofmanufacturing the circuits can be suppressed and an influence of anelement to be compared can be obtained precisely.

By changing the capacitance of the circuits stepwise to change theoutput load, an operating margin, an optimum solution and the like canbe analyzed easily. Further, a decoder can be used as the selectioncircuit, instead of the shift register.

When a digital output is employed in this embodiment mode, for example,the substrate for evaluation is formed to have a configuration as shownin FIG. 3. In this embodiment mode, the ring oscillators are evaluatedby using 20-bit counters.

In the case of the digital output, the ring oscillator, which willoutput data, is selected by using the output of each stage of the shiftregister. Also, a sampling pulse is input in the counter. When thesampling pulse is low, the counter is reset. When the sampling pulse ishigh, the counter counts the sampling pulse. A sampling time isdetermined according to a width of the sampling pulse. Since the digitaloutput is employed, the digital output is read in by a logic analyzerand an electronic file is analyzed so that information about anoscillation frequency and the like can be obtained. In the case ofevaluating the deterioration, a coefficient of fluctuation of thesenumerical values may be used.

Alternatively, an oscillation frequency and the like may beautomatically calculated in measurement and only a numerical value maybe stored ultimately. An operator can obtain predetermined informationby reading out and processing the stored data on an as needed basis.Also, a series of treatments after the calculation of each parameter maybe performed by a computer.

Further, a shift register with a configuration as shown in FIG. 4 may beused as the shift register that is used in outputting a digital signal.Moreover, a decoder may be used as substitute for the shift register.

Moreover, in this case, the counters can be considered as an example ofthe determination circuit. That is, the number of pulses output by thering oscillators is counted during a sampling time. For example, if thenumber of pulses is 2^(k) or more, the k^(th) bit becomes “1”.Therefore, the k^(th) bit can be considered as data that is determinedif the number of pulses is 2^(k) or more.

Further, the present embodiment mode can be implemented by beingcombined with an applicable concept of another embodiment modesaccording to the invention.

[Embodiment Mode 3]

The present embodiment mode shows a configuration in which n pieces ofthe same ring oscillators are provided as a plurality of circuits over asubstrate for evaluation according to the invention so as to examine aninfluence due to variation in semiconductor elements included in thering oscillators. An analog output is employed. This embodiment modewill be described with reference to FIG. 2.

The variation in reliability of the semiconductor elements such as thinfilm transistors that are included in the ring oscillators is assumed asone of reasons why a result of the deterioration caused in one ringoscillator is differed of a result of the deterioration caused in a CPU.In order to examine the influence of the variation in reliability of thesemiconductor elements, the substrate for evaluation according to theinvention is formed.

The substrate for evaluation according to the invention comprises npieces of ring oscillators each of which has the same configuration,switches 100 for turning outputs of the respective ring oscillatorson/off, and a shift register. By stopping a supply of a clock into theshift register, the switches are controlled to turn on/off to select onering oscillator, thereby obtaining its output. In this embodiment mode,the shift register and the switches 100 correspond to the selectioncircuit of Embodiment Mode 1. The determination circuit of EmbodimentMode 1 is not mounted over the same substrate in this embodiment mode.

In this case, since the configuration of FIG. 2 employs the analogoutput, an analog signal is directly output to an oscilloscope and aplotter so that a waveform can be observed. According to the waveform, alot of information about an oscillation frequency, an amplitude, a risetime, a fall time and the like can be obtained. When evaluating thedeterioration, the all ring oscillators are measured by a unit of ΔTthat is sufficiently shorter with respect to a deterioration rate.Measurement of two or more units may be carried out to find acoefficient of fluctuation of these numerical values. The output datamay be processed properly. For example, the output data may be digitizedor a necessary part of the output data may be extracted to bedetermined. Alternatively, the output data may be stored in a memorizingmeans so that it is evaluated by reading out it from the memorizingmeans on an as needed basis. The output data may be stored in thememorizing means via a computer.

As a result of this measurement, the degree of deterioration of a mostdeteriorated ring oscillator is closest to the degree of deteriorationdue to the semiconductor elements in the CPU.

When performing the evaluation by using the substrate for evaluation ofthe invention, since the plurality of circuits can simultaneously beoperated and one output is employed, the plurality of circuits can beevaluated at extremely shorter times as compared with the case ofmeasuring multiple independent circuit TEGs individually so thatstatistical data can be extracted precisely. In addition, since thesecircuits are formed over the same substrate, an adverse influence of thevariation caused in each step of manufacturing the circuits can beprevented. Therefore, the influence of different degrees ofdeterioration of the semiconductor elements can be confirmed moreprecisely.

When outputting a digital signal in this embodiment mode, the substratefor evaluation is formed to have a configuration as shown in FIG. 3.This embodiment mode shows an example in which ring oscillators areevaluated by using 20-bit counters. In the case of outputting thedigital signal, the ring oscillator, which will output data, is selectedby using an output of each stage of the shift register. Also, a samplingpulse is input in the counter. When the sampling pulse is low, thecounter is reset. When the sampling pulse is high, the counter countsthe sampling pulse. A sampling time is determined according to a widthof the sampling pulse. Since a digital output is employed, the digitaloutput is read in by a logic analyzer and an electronic file is analyzedso that information about an oscillation frequency and the like can beobtained. In the case of evaluating the degree of deterioration of thecircuits, a coefficient of fluctuation of these numerical values may beused.

Moreover, in this case, the counters can be considered as an example ofthe determination circuit. That is, the number of pulses output by thering oscillators is counted during a sampling time. For example, if thenumber of pulses is 2^(k) or more, the k^(th) bit becomes “1”.Therefore, the k^(th) bit can be considered as data that is determinedif the number of pulses is 2^(k) or more.

Alternatively, an oscillation frequency and the like in the measurementmay be automatically calculated and only a numerical value may be storedultimately. An operator can obtain predetermined information by readingout and processing the stored data on an as needed basis. Also, a seriesof treatments after the calculation of each parameter may be performedby a computer.

Further, the shift register with the configuration as shown in FIG. 4may be used in outputting a digital signal. As the selection circuit, adecoder may be used, in addition to the shift register.

Furthermore, the present embodiment mode can be implemented by beingfreely combined with an acceptable concept of another embodiment modesof the invention.

[Embodiment Mode 4]

The present embodiment mode will describe a method for evaluating anoperating margin of a circuit modeled as a complicated logic circuitsuch as a CPU, a substrate for evaluation and an evaluation system usedfor this method with reference to FIGS. 5A and 5B.

A substrate for evaluation of the present embodiment mode includes npieces of registers A1 to An synchronizing with a clock A; n pieces ofregisters B1 to Bn synchronizing with a clock B; and inverter chains 200i (“i” corresponds 1 to n) connected between the registers Ai and theregisters Bi. One evaluation circuit comprises a register Ai, aninverter chain 200 i and a register Bi. Over the substrate forevaluation, n pieces of evaluation circuits are formed. Input data froman external unit is input in the registers A1 to An. Also, data of theregisters B1 to Bn is output to an external unit via the switches. Ashift register controls to turn the switches on/off by stopping a clockso that one evaluation circuit is selected to obtain an output thereof.Further, the n pieces of evaluation circuits are formed over the samesubstrate to form the substrate for evaluation of the invention.

Meanwhile, it can be thought that a logic circuit is generally connectedwith various types of logic gates having a various kinds of loadsbetween registers synchronizing with clocks. Such logic circuits arebriefly modeled as evaluation circuits in FIG. 5A. The operating marginof this evaluation circuit can be thought as an operating margin of datatransfer between the registers. However, the operating margin depends ondelay δg due to the logic gate between the registers, clock skew (delayδc between a clock A and a clock B) and the like.

For example, when an inverter chain of this evaluation circuit isadjusted to a critical path (a logic circuit under a condition in whichan operating margin is most strict), the logic circuit can be modeledand the operating margin with respect to the clock skew can beevaluated. In addition, by using the plurality of evaluation circuits,evaluation can be carried out in consideration of the variation of thecircuits. An evaluation method using this embodiment mode will bedescribed below.

In order to evaluate an operating margin of clock skew in considerationof the variation of properties of thin film transistors included in thelogic circuits, n pieces of evaluation circuits are first formed to havethe same configuration. The evaluation circuits are adjusted to acritical path of the logic circuits. Then, a clock B that is delayed byδc1 with respect to a clock A to be input in the register An is input ina register Bn and outputs of the n pieces of evaluation circuits arerespectively measured.

When δc1 is within the allowable range of the clock skew in the allevaluation circuits, the evaluation circuits output normally. The outputresults may be output into an external logic analyzer, oscilloscope ormonitor. Alternatively, the output results may be printed out.

Also, the output results may be stored in a memorizing means so that theoutput results may be read out to be evaluated on an as needed basis.The output results may be stored in the memorizing means via a computer.

Subsequently, the clock B that is delayed by δc2 different from the δc1is input in the register Bn to be measured similarly. Hereinafter,outputs of the n pieces of evaluation circuits are respectively measuredin the same manner. When the δc2 is within the allowable range of delayin the evaluation circuits, the all evaluation circuits output normally.When the δc2 is beyond the allowable range of delay in the evaluationcircuits, the evaluation circuits output abnormally. Although the amountof δc is increased in this embodiment mode, it is not particularlylimited.

Accordingly, it is possible to easily estimate how much the allowablerange of the clock skew is changed depending on the variation of theproperties of the thin film transistors included in the logic circuits,at short times. This allows to easily obtain information for adjusting aclock skew of thin film transistors of a CPU, which are formed in thesame manufacturing process as those of the logic circuits, to a suitablelevel at short times.

Additionally, a variety of operating margins can be evaluated by usingthe inverter chains with various types of numbers or loads as inverterchains corresponding to the critical path of the logic circuits.

Consequently, a margin in consideration of the properties of the thinfilm transistors and their variations can be obtained rapidly andprecisely by knowing the limits of δc so that it is possible to feedback the margin to a design of the CPU. In addition, the design of theCPU can be changed rapidly to improve the yield of the CPU and operatingcharacteristics thereof.

The cases of a normal operation and an abnormal operation of thecircuits as shown in FIG. 5A will be described with reference to FIG.5B. Concretely, δx represents delay in a point P(x) where data outputfrom a register Ax is input in the logic circuit (e.g., the inverterchain 200 x in FIG. 5A) and output from the logic circuit. δy representsdelay in a point P(y) where data output from a register Ay is input inthe logic circuit and output therefrom. Also, L(A) is a calculationresult concerned to an input A. L(B) is a calculation result related toan input B. L(C) is a calculation result related to an input C. Further,the timing chart of FIG. 5B shows an example in the case of usingregisters that are inverted on the leading edge of a clock. When thelogic circuit is normally operated, the L(A) is output in a period Awhereas the L(B) is output in a period B.

Data is output from the register An in synchronization with the clock A.Until the data output from the register An is input in a logic circuitportion and output from the logic circuit portion, delay of δn is causedin the point P(n) immediately before the register Bn depending on theproperties of the thin film transistors, wiring resistance orcapacitance of the logic circuit portion. The δn takes a different valuein each of the evaluation circuits 1 to n according to the variation ofproperties of the thin film transistors in the logic circuit portion orthe difference in configuration of the logic circuits. An output fromthe logic circuit that is delayed by the δn and the clock B that isdelayed by δc with respect to the clock A are input in the register Bn.

In the case of an evaluation circuit x in which delay δx of a signal inthe logic circuit portion is longer than δc the L(A) is output in theperiod A while the L(B) is output in the period B, and therefore, theevaluation circuit x is operated normally. However, in the case of anevaluation circuit y in which delay δy of a signal in the logic circuitportion is shorter than δc, the L(B) is output in the period A and theL(C) is output in the period B. Therefore, the evaluation circuit y isoperated abnormally.

When the evaluation circuits 1 to n with the same configuration areemployed, the evaluation circuits are measured by changing the delay δcof the clock B with respect to the clock A step-by-step. This allows torapidly and precisely grasp an allowable range of delay of the clock Bsuch that the evaluation circuits are not operated abnormally due todelay in the logic circuit portion that is caused by the variation ofproperties of the thin film transistors included in the evaluationcircuits.

Furthermore, by changing the configurations of the logic circuit portionof the evaluation circuits 1 to n respectively, an allowable range ofdelay δc of the clock B with respect to the clock A in the evaluationcircuits having the respective logic circuit portion can be graspedrapidly and precisely.

Further, a determination circuit as shown in FIG. 6 may be provided inthe circuit of FIG. 5. In FIG. 6, comparative data is input in areference register of the determination circuit. L(A) is output in aperiod A while L(B) is output in a period B. As a result, when thedetermination circuit of FIG. 6 outputs 0, it is determined that theevaluation circuits are operated normally, and when the determinationcircuit outputs 1, it is determined that the evaluation circuits areoperated abnormally.

By feeding back the thus-obtained results to a design of a logic circuitsuch as a CPU, the logic circuit can be designed more precisely. As aconsequence, a circuit with a highly reliable operation can be provided.

Since a large scale circuit such as a CPU comprises a larger number ofelements as compared with a ring oscillator, variation of the elementsbecomes a significant parameter. The substrate for evaluation accordingto the present invention has a purpose of evaluating the variation indeterioration degrees of the elements by using a number of ringoscillators. By evaluating the distribution of deterioration degrees fora number of ring oscillators and converting the evaluated results intothe number of elements used in the large scale circuit such as the CPU,the degree of deterioration of the CPU can be evaluated.

Moreover, the present embodiment mode can be implemented by being freelycombined with an acceptable concept of another embodiment modes of theinvention.

[Embodiment Mode 5]

The present embodiment mode will describe the evaluation method of theinvention with reference to flow charts.

FIG. 7 is a flow chart in the case of using the substrate for evaluationas shown in FIG. 1A. Upon setting a condition for driving n pieces ofevaluation circuits (300), the evaluation circuits are driven (301).Subsequently, a given evaluation circuit is sampled (302) and samplingdata is determined (303), thereby outputting a result (304). Thereafter,it is determined whether or not the sampling is continuously carried outto evaluate the evaluation circuit (305). A criterion for determiningwhether the evaluation is continued or stopped is set by an operator inadvance. As examples of the determination criteria, a time, a samplingtime, a determination result, a value of sampling data and the like canbe mentioned. Of course, the evaluation may be stopped manually. Whenthe evaluation is continued, the flow returns to the sampling step (302)and a series of treatments are repeated. In the step 305, upondetermining the stop of the evaluation, the drive of the evaluationcircuits is stopped (306), and hence, the evaluation is completed.

FIG. 8 is a flow chart in the case of evaluating evaluation circuits ina different way than FIG. 7. This flow chart of FIG. 8 uses thesubstrate for evaluation as shown in FIG. 1C. Upon setting a conditionfor driving n pieces of evaluation circuits (320), the n pieces ofevaluation circuits are driven (321) and a given evaluation circuit issampled in the same manner as the flow chart as shown in FIG. 7. Aftersampling the given evaluation circuit, the sampling data is outputwithout determining the sampling data (323). Thereafter, it isdetermined whether the evaluation is continued or stopped (324) in thesame manner as FIG. 7. When it is determined that the evaluation shouldbe continued, the flow is returned to the sampling step (322) and aseries of processes are repeated. When it is determined that theevaluation should be stopped, the drive of the evaluation circuits isstopped (325), and hence, the evaluation is completed.

The present application is based on Japanese Priority Application No.2004-151093 filed on May 20, 2004 with the Japanese Patent Office, theentire contents of which are hereby incorporated by reference.

1. A method for extracting circuit parameters from a semiconductordevice, comprising: inputting a signal commonly to each of a pluralityof evaluation circuits formed over a substrate; consecutively selectingindividual evaluation circuits from the plurality of evaluation circuitswith a selection circuit; and measuring output data for individualevaluation circuits, while operating the evaluation circuitsconcurrently, by measuring outputs of the individual evaluation circuitsas each evaluation circuit is consecutively selected; and using themeasured output data in determining circuit parameters of thesemiconductor device.
 2. A method for extracting circuit parameters froma semiconductor device according to claim 1, wherein at least one of theplurality of evaluation circuits is a ring oscillator.
 3. A method forextracting circuit parameters from a semiconductor device according toclaim 1, wherein at least one of the evaluation circuits is a register.4. A method for extracting circuit parameters from a semiconductordevice, comprising: inputting a signal commonly to each of a pluralityof evaluation circuits formed over a substrate; consecutively selectingindividual evaluation circuits from the plurality of evaluation circuitswith a selection circuit; processing outputs from individual evaluationcircuits, with a determination circuit, as each evaluation circuit isconsecutively selected; and using the processed outputs in determiningcircuit parameters of the semiconductor device.
 5. A method forextracting circuit parameters from a semiconductor device according toclaim 4, wherein each of the plurality of evaluation circuits is a ringoscillator.
 6. A method for extracting circuit parameters from asemiconductor device according to claim 4, wherein each of the pluralityof evaluation circuits is a register.
 7. A method for extracting circuitparameters from a semiconductor device, comprising: inputting a signalcommonly to each of a plurality of evaluation circuits formed over asubstrate; consecutively selecting individual evaluation circuits fromthe plurality of evaluation circuits with a selection circuit; measuringoutput data for individual evaluation circuits, while operating theplurality of evaluation circuits concurrently, by measuring outputs ofthe individual evaluation circuits as each evaluation circuit isconsecutively selected; and using the measured output data indetermining circuit parameters of the semiconductor device, wherein theevaluation circuits are designed such that the evaluation circuits havedifferent circuit parameters.
 8. A method for extracting circuitparameters from a semiconductor device according to claim 7, wherein atleast one of the plurality of evaluation circuits is a ring oscillator.9. A method for extracting circuit parameters from a semiconductordevice according to claim 7, wherein at least one of the plurality ofevaluation circuits is a register.
 10. A method for extracting circuitparameters from a semiconductor device, comprising: inputting a signalcommonly to each of a plurality of evaluation circuits formed over asubstrate; consecutively selecting individual evaluation circuits fromthe plurality of evaluation circuits with a selection circuit;processing outputs from individual evaluation circuits, with adetermination circuit, as each evaluation circuit is consecutivelyselected; measuring an output from the determination circuit whileoperating the evaluation circuits concurrently; and using the measuredoutput from the determination circuit in determining circuit parametersof the semiconductor device, wherein the evaluation circuits aredesigned such that the evaluation circuits have different circuitparameters.
 11. A method for extracting circuit parameters from asemiconductor device according to claim 10, wherein at least one of theplurality of evaluation circuits is a ring oscillator.
 12. A method forextracting circuit parameters from a semiconductor device according toclaim 10, wherein at least one of the plurality of evaluation circuitsis a register.
 13. A method for extracting circuit parameters from asemiconductor device, comprising: inputting a signal commonly to each ofa plurality of evaluation circuits formed over a substrate;consecutively selecting individual evaluation circuits from theplurality of evaluation circuits with a selection circuit; measuringoutput data for individual evaluation circuits, while operating theplurality of evaluation circuits concurrently, by measuring outputs ofthe individual evaluation circuits as each evaluation circuit isconsecutively selected; storing the measured output data for theindividual evaluation circuits in a recording medium; and evaluating achange over time in the output data stored for the individual evaluationcircuits.
 14. A method for extracting circuit parameters from asemiconductor device according to claim 13, wherein at least one of theplurality of evaluation circuits is a ring oscillator.
 15. A method forextracting circuit parameters from a semiconductor device according toclaim 13, wherein at least one of the plurality of evaluation circuitsis a register.
 16. A method for extracting circuit parameters from asemiconductor device, comprising: inputting a signal commonly to aplurality of evaluation circuits formed over a substrate; consecutivelyselecting individual evaluation circuits from the plurality ofevaluation circuits with a selection circuit; processing outputs fromindividual evaluation circuits, with a determination circuit, as eachevaluation circuit is selected; measuring an output from thedetermination circuit while operating the evaluation circuitsconcurrently; storing the measured output in a recording medium; andevaluating a change over time in the stored output data.
 17. A methodfor extracting circuit parameters from a semiconductor device accordingto claim 16, wherein each of the plurality of evaluation circuits is aring oscillator.
 18. A method for extracting circuit parameters from asemiconductor device according to claim 16, wherein at least one of theplurality of evaluation circuits is a register.
 19. A method forextracting circuit parameters from a semiconductor device, comprising:inputting a signal commonly to each of a plurality of evaluationcircuits formed over a substrate; and consecutively selecting individualevaluation circuits from the plurality of evaluation circuits with aselection circuit; measuring output data for individual evaluationcircuits, while operating the plurality of evaluation circuitsconcurrently, by measuring outputs of the individual evaluation circuitsas each evaluation circuit is consecutively selected; storing themeasured output data for the individual evaluation circuits in arecording medium; and evaluating a change over time in the output datastored for the individual evaluation circuits, wherein the plurality ofevaluation circuits are designed such that the evaluation circuits havedifferent circuit parameters.
 20. A method for extracting circuitparameters from a semiconductor device according to claim 19, wherein atleast one of the plurality of evaluation circuits is a ring oscillator.21. A method for extracting parameters from a semiconductor deviceaccording to claim 19, wherein at least one of the evaluation circuitsis a register.
 22. A method for extracting circuit parameters from asemiconductor device, comprising: inputting a signal commonly to each ofa plurality of evaluation circuits formed over a substrate; andconsecutively selecting individual evaluation circuits from theplurality of evaluation circuits with a selection circuit; processingoutputs from individual evaluation circuits, with a determinationcircuit, as each evaluation circuit is selected; measuring an outputfrom the determination circuit while operating the evaluation circuitsconcurrently; storing the measured output in a recording medium; andevaluating a change over time in the stored output data, wherein theevaluation circuits are designed such that the evaluation circuits havedifferent circuit parameters.
 23. A method for extracting circuitparameters from a semiconductor device according to claim 22, wherein atleast one of the evaluation circuits is a ring oscillator.
 24. A methodfor extracting parameters from a semiconductor device according to claim22, wherein at least one of the evaluation circuits is a register.
 25. Asemiconductor device comprising: a substrate; a first evaluation circuitover the substrate; a second evaluation circuit over the substrate; afirst switch; a second switch; a selection circuit for consecutivelyselecting the first evaluation circuit and the second evaluationcircuit; and a determination circuit for calculating output data fromthe first evaluation circuit and the second evaluation circuit, whereinthe determination circuit is electrically connected to the selectioncircuit; wherein the first evaluation circuit is electrically connectedto the selection circuit through the first switch, wherein the secondevaluation circuit is electrically connected to the selection circuitthrough the second switch, and wherein the selection circuit isconfigured to control opening and closing of the first and secondswitches such that when the first evaluation circuit is selected, thefirst switch is closed and the second switch is opened, and when thesecond evaluation circuit is selected, the first switch is opened andthe second switch is closed.
 26. A semiconductor device according toclaim 25, wherein at least one of the first evaluation circuit and thesecond evaluation circuit is a ring oscillator.
 27. A semiconductordevice according to claim 25, wherein at least one of the firstevaluation circuit and the second evaluation circuit is a register. 28.A semiconductor device comprising: a substrate; an input terminal forreceiving a signal; an output terminal connected to a computer; a firstevaluation circuit over the substrate; a second evaluation circuit overthe substrate; a first switch; a second switch; and a selection circuitfor consecutively selecting the first evaluation circuit and the secondevaluation circuit, wherein the first evaluation circuit is electricallyconnected to the selection circuit through the first switch, wherein thesecond evaluation circuit is electrically connected to the selectioncircuit through the second switch, and wherein the selection circuit isconfigured to control opening and closing of the first and secondswitches such that when the first evaluation circuit is selected, thefirst switch is closed and the second switch is opened, and when thesecond evaluation circuit is selected, the first switch is opened andthe second switch is closed.
 29. A semiconductor device according toclaim 28, wherein at least one of the first evaluation circuit and thesecond evaluation circuit is a ring oscillator.
 30. A semiconductordevice according to claim 28, wherein at least one of the firstevaluation circuit and the second evaluation circuit is a register.